Creation of Submicrometer Structures Using Polymeric Nanoparticle Layers and Photolithography
Author:
Affiliation:
1. Ames Laboratory-U.S.Department of Energy, Microanalytical Instrumentation Center, and Department of Chemistry, Iowa State University, Ames, Iowa 50011
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl025704g
Reference41 articles.
1. Peer Reviewed: Polymeric Microelectromechanical Systems.
2. Lab-on-a-Chip: A Revolution in Biological and Medical Sciences.
3. Micro Total Analysis Systems. 1. Introduction, Theory, and Technology
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