Enhancing Ordering Dynamics in Solvent-Annealed Block Copolymer Films by Lithographic Hard Mask Supports
Author:
Affiliation:
1. DWI—Leibniz-Institut für Interaktive Materialien, Forckenbeckstraße 50, 52056, Aachen Germany
2. IBM Research—Zurich, Säumerstrasse 4, CH-8803 Rüschlikon, Switzerland
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ma500561q
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