Fabrication and Characterization of Patterned Single-Crystal Silicon Nanolines-Reference-Cited by-同舟云学术

Fabrication and Characterization of Patterned Single-Crystal Silicon Nanolines

Published:2007-12-07 Issue:1 Volume:8 Page:92-98
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Li Bin¹,Kang Min K.¹,Lu Kuan¹,Huang Rui¹,Ho Paul S.¹,Allen Richard A.¹,Cresswell Michael W.¹

Affiliation:

1. Microelectronics Research Center, University of Texas, Austin, Texas 78758, Department of Aerospace Engineering and Engineering Mechanics, University of Texas, Austin, Texas 78712, and Semiconductor Electronics Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/nl072144i

Reference47 articles.

1. Small angle x-ray scattering measurements of lithographic patterns with sidewall roughness from vertical standing waves

2. Traceable calibration of critical-dimension atomic force microscope linewidth measurements with nanometer uncertainty

3. Functional Nanowires

4. A novel interconnection technique for manufacturing nanowire devices

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