Manipulation of the Asymmetric Swelling Fronts of Photoresist Polyelectrolyte Gradient Thin Films
Author:
Affiliation:
1. Polymers Division, Center for Neutron Research, National Institute of Standards and Technology, 100 Bureau Dr., Gaithersburg, Maryland 20899
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp806788e
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1. Chemical Amplification Resists for Microlithography
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