Surface Pseudorotation in Lewis-Base-Catalyzed Atomic Layer Deposition of SiO2: Static Transition State Search and Born–Oppenheimer Molecular Dynamics Simulation-Reference-Cited by-同舟云学术

Surface Pseudorotation in Lewis-Base-Catalyzed Atomic Layer Deposition of SiO2: Static Transition State Search and Born–Oppenheimer Molecular Dynamics Simulation

Published:2012-12-06 Issue:50 Volume:116 Page:26436-26448
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Fang Guoyong¹²,Chen Shuang¹,Li Aidong³,Ma Jing¹

Affiliation:

1. Institute of Theoretical and Computational Chemistry, Key Laboratory of Mesoscopic Chemistry of Ministry of Education, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210093, P. R. China

2. College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, P. R. China

3. National Laboratory of Solid State Microstructure, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, P. R. China

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/jp309974r

Reference98 articles.

1. Atomic Layer Deposition of Nanostructured Materials

2. Growth of SiO 2 at Room Temperature with the Use of Catalyzed Sequential Half-Reactions

3. Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

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