Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers-Reference-Cited by-同舟云学术

Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers

Published:2019-09-03 Issue:10 Volume:19 Page:6788-6799
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Fan Xuge¹^ORCID,Forsberg Fredrik²,Smith Anderson D.³^ORCID,Schröder Stephan¹,Wagner Stefan⁴,Östling Mikael³,Lemme Max C.⁴³^ORCID,Niklaus Frank¹^ORCID

Affiliation:

1. Department of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden

2. Scania Tekniskt Centrum, 15148 Södertälje, Sweden

3. Department of Integrated Devices and Circuits, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-164 40 Kista, Sweden

4. Faculty of Electrical Engineering and Information Technology, RWTH Aachen University, Otto-Blumenthal-Strsse 25, 52074 Aachen, Germany

Funder

Bundesministerium f?r Bildung und Forschung

Vetenskapsr?det

Deutsche Forschungsgemeinschaft

China Scholarship Council

H2020 European Research Council

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

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