Effects of Frequency on Modeling High-Frequency Electric Discharge Reactors

Author:

Bell A. T.

Publisher

American Chemical Society (ACS)

Subject

General Engineering

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. A Career in Catalysis: Alexis T. Bell;ACS Catalysis;2017-11-13

2. Modeling of silicon nitride deposition by RF plasma-enhanced chemical vapor deposition;Chemical Engineering Science;1994

3. Kinetic Aspect of PACVD Modeling;High Energy Density Technologies in Materials Science;1990

4. Continuum modeling of argon radio frequency glow discharges;Applied Physics Letters;1987-03-02

5. Spatial dependence of particle light scattering in an rf silane discharge;Applied Physics Letters;1985-02

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