High Aspect Subdiffraction-Limit Photolithography via a Silver Superlens
Author:
Affiliation:
1. Institute of Materials Research and Engineering, Agency for Science, Technology and Research (A*STAR), 3 Research Link, Singapore 117602
2. Department of Physics, Imperial College London, London SW7 2AZ, United Kingdom
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl2044088
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