Tunable Plasticity in Amorphous Silicon Carbide Films-Reference-Cited by-同舟云学术

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Tunable Plasticity in Amorphous Silicon Carbide Films

Published:2013-08-06 Issue:16 Volume:5 Page:7950-7955
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Matsuda Yusuke¹,Kim Namjun²,King Sean W.³,Bielefeld Jeff³,Stebbins Jonathan F.²,Dauskardt Reinhold H.¹

Affiliation:

1. Department of Materials Science and Engineering, Stanford University, Stanford, California 94305, United States

2. Department of Geological & Environmental Sciences, Stanford University, Stanford, California 94305, United States

3. Logic Technology Development, Intel Corporation, Hillsboro, Oregon 97124, United States

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/am402046e

Reference40 articles.

1. Low Dielectric Constant Materials

2. Low dielectric constant materials for microelectronics

3. Reliability Challenges with Ultra-Low k Interlevel Dielectrics

4. Molecular Origins of the Mechanical Behavior of Hybrid Glasses

5. Moisture-Insensitive Polycarbosilane Films with Superior Mechanical Properties

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3. Influence of topological constraints on ion damage resistance of amorphous hydrogenated silicon carbide;Acta Materialia;2019-02

4. A ternary–3D analysis of the optical properties of amorphous hydrogenated silicon–rich carbide;Materials Chemistry and Physics;2019-01

5. Narrowing of the Boolchand intermediate phase window for amorphous hydrogenated silicon carbide;Journal of Non-Crystalline Solids;2018-11

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