Shape and Size Control of Regularly Arrayed Nanodots Fabricated Using Ultrathin Alumina Masks
Author:
Affiliation:
1. Institut für Nanotechnologie, Forschungszentrum Karlsruhe, Karlsruhe, Germany 76021, and Singapore-MIT Alliance and Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm048609c
Reference38 articles.
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