1. Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen 361005, China
2. Department of Materials Science and Engineering, and Optoelectronics Convergence Research Center, Chonnam National University, Gwangju 500-757, South Korea
3. EtaDUV Department of R&D, Etanics Semiconductor Ltd, Xiamen 361006, China
4. Maanshan Jason Semiconductor Co., Ltd., E&T Development Zone Maanshan, Maanshan 243071, China
5. BeyondUV Co., Ltd., Hangzhou 311200, China
6. State Key Laboratory for Artificial Microstructures and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
7. Fujian Provincial Center for Disease Control and Prevention, Fuzhou 350001, China