Atomic Layer Etching: Rethinking the Art of Etch
Author:
Affiliation:
1. Lam Research Corporation, Fremont, California 94538, United States
Publisher
American Chemical Society (ACS)
Subject
General Materials Science,Physical and Theoretical Chemistry
Link
http://pubs.acs.org/doi/pdf/10.1021/acs.jpclett.8b00997
Reference31 articles.
1. Overview of atomic layer etching in the semiconductor industry
2. Atomic Layer Deposition: An Overview
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5. ENERGY DEPENDENCE OF ION-INDUCED SPUTTERING YIELDS FROM MONATOMIC SOLIDS AT NORMAL INCIDENCE
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