Quantifying the Extent of Ligand Incorporation and the Effect on Properties of TiO2 Thin Films Grown by Atomic Layer Deposition Using an Alkoxide or an Alkylamide-Reference-Cited by-同舟云学术

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Quantifying the Extent of Ligand Incorporation and the Effect on Properties of TiO2 Thin Films Grown by Atomic Layer Deposition Using an Alkoxide or an Alkylamide

Published:2020-01-23 Issue:4 Volume:32 Page:1393-1407
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Dufond Maxime E.¹,Diouf Maïmouna W.¹²,Badie Clémence¹,Laffon Carine¹,Parent Philippe¹,Ferry Daniel¹,Grosso David³^ORCID,Kools Jacques C. S.²,Elliott Simon D.⁴^ORCID,Santinacci Lionel¹^ORCID

Affiliation:

1. Aix-Marseille University, CNRS, CINaM, Marseille, France

2. Encapsulix SAS, Simiane-Collongue 13109, France

3. Aix Marseille University, Université de Toulon, CNRS, IM2NP, Marseille, France

4. Schrödinger Inc., New York, New York 10036-4041, United States

Funder

Conseil R?gional Provence-Alpes-C?te d'Azur

Minist?re de l'Enseignement sup?rieur, de la Recherche et de l'Innovation

Agence Nationale de la Recherche

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.9b03621

Reference70 articles.

1. Titanium Dioxide Nanomaterials: Synthesis, Properties, Modifications, and Applications

2. Growth and Crystallization of TiO2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium

3. Microstructure modification of amorphous titanium oxide thin films during annealing treatment

4. A review on nano-TiO2 sol–gel type syntheses and its applications

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