Practical Aspects of Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry Analysis Enhanced by Fluorine Gas Coinjection-Reference-Cited by-同舟云学术

Practical Aspects of Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry Analysis Enhanced by Fluorine Gas Coinjection

Published:2021-02-16 Issue:5 Volume:33 Page:1581-1593
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Wieczerzak Krzysztof¹^ORCID,Priebe Agnieszka¹^ORCID,Utke Ivo¹^ORCID,Michler Johann¹

Affiliation:

1. Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland

Funder

European Commission

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.1c00052

Reference62 articles.

1. Stevie, F. A. In Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice; Giannuzzi, L. A., Stevie, F. A., Eds. Springer: New York, 2005; Chapter 13, pp 269–280.

2. Fearn, S. An Introduction to Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) and Its Application to Materials Science; Morgan & Claypool Publishers: San Rafael, CA, 2015; Chapter 1, pp 1–6.

3. From FIB-SIMS to SIMS-FIB. The prospects for a 10 nm lateral resolution SIMS instrument with full FIB functionality

4. High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument withIn SituAFM

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Kinetics and mechanisms of high-temperature oxidation in BCC and FCC high-alloy Fe-based alloys with high volume fraction of carbides;Materials & Design;2024-08

2. Roadmap for focused ion beam technologies;Applied Physics Reviews;2023-12-01

3. Recent Methods & Protocols from Chemistry of Materials: Promoting High-Quality Research and Transparency;Chemistry of Materials;2023-09-12

4. Review of Recent Advances in Gas-Assisted Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry (FIB-TOF-SIMS);Materials;2023-03-03

5. In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum;Nanomaterials;2022-08-06