Cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM-Reference-Cited by-同舟云学术

Cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM

Author:

Jasim Ahmed M.¹,He Xiaoqing²³,Xing Yangchuan¹³^ORCID,White Tommi A.²⁴,Young Matthias J.¹⁵^ORCID

Affiliation:

1. Department of Biomedical, Biological and Chemical Engineering, University of Missouri, Columbia, Missouri 65211, United States

2. Electron Microscopy Core, University of Missouri, Columbia, Missouri 65211, United States

3. Department of Mechanical & Aerospace Engineering, University of Missouri, Columbia, Missouri 65211, United States

4. Department of Biochemistry, University of Missouri, Columbia, Missouri 65211, United States

5. Department of Chemistry, University of Missouri, Columbia, Missouri 65211, United States

Funder

University of Missouri

Publisher

American Chemical Society (ACS)

Subject

General Chemical Engineering,General Chemistry

Link

Reference112 articles.

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