Electrochemically Synthesized Tin/Lithium Alloy To Convert Laser Light to Extreme Ultraviolet Light-Reference-Cited by-同舟云学术

Electrochemically Synthesized Tin/Lithium Alloy To Convert Laser Light to Extreme Ultraviolet Light

Published:2018-10-02 Issue:10 Volume:3 Page:12422-12427
ISSN:2470-1343
Container-title:ACS Omega
language:en
Short-container-title:ACS Omega

Author:

Nagai Keiji¹^ORCID,Musgrave Christopher S. A.¹,Kuwata Naoaki²,Kawamura Junichi²

Affiliation:

1. Laboratory for Chemistry and Life Science, Institute of Innovative Research, Tokyo Institute of Technology, R1-26, Nagatsuta 4259, Midori-ku, Yokohama 226-8503, Kanagawa, Japan

2. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Katahira 2-1-1, Sendai 980-8577, Miyagi, Japan

Funder

Ministry of Education, Culture, Sports, Science and Technology

Japan Society for the Promotion of Science

Publisher

American Chemical Society (ACS)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.acs.org/doi/pdf/10.1021/acsomega.8b01220

Reference44 articles.

1. EUV Sources for Lithography

2. Pushing the limits of lithography

3. Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography

4. Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources

5. Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography

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3. Gallium–tin alloys as a low melting point liquid metal for repetition-pulse-laser-induced high energy density state toward compact pulse EUV sources;RSC Advances;2019