Shape Transformation Photolithography: Self-Assembled Arrays of Suspended MEMS Structures from Patterned Polymer Membranes-Reference-Cited by-同舟云学术

Shape Transformation Photolithography: Self-Assembled Arrays of Suspended MEMS Structures from Patterned Polymer Membranes

Published:2018-12-27 Issue:12 Volume:3 Page:18489-18498
ISSN:2470-1343
Container-title:ACS Omega
language:en
Short-container-title:ACS Omega

Author:

Sherehiy Andriy¹,Rathfon Jeremy M.¹,Abe Hiroya¹²^ORCID,Chowdhury Sri Sukanta¹,Cohn Robert W.¹^ORCID

Affiliation:

1. ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky 40292, United States

2. Graduate School of Environmental Studies, Tohoku University, Aramaki 6-6-11-604, Aoba, Sendai 980-8579, Japan

Funder

Division of Electrical, Communications and Cyber Systems

Kentucky Science and Technology Corporation

Publisher

American Chemical Society (ACS)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.acs.org/doi/pdf/10.1021/acsomega.8b02763

Reference36 articles.

1. Nain, A.; Sitti, M. 3-D nanoscale manufacturing by nanoprobes based controlled pulling of liquid polymers. IEEE Nanotechnology Conference 2, San Francisco, Aug 2003; pp 60–63.

2. Direct Drawing of Suspended Filamentary Micro- and Nanostructures from Liquid Polymers

3. Drawing suspended polymer micro-/nanofibers using glass micropipettes

4. Draw Spinning of Wafer-Scale Oxide Fibers for Electronic Devices

5. Continuous Draw Spinning of Extra-Long Silver Submicron Fibers with Micrometer Patterning Capability

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