Toward Atomic-Scale Device Fabrication in Silicon Using Scanning Probe Microscopy-Reference-Cited by-同舟云学术

Toward Atomic-Scale Device Fabrication in Silicon Using Scanning Probe Microscopy

Published:2004-09-28 Issue:10 Volume:4 Page:1969-1973
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Ruess Frank J.¹,Oberbeck Lars¹,Simmons Michelle Y.¹,Goh Kuan Eng J.¹,Hamilton Alex R.¹,Hallam Toby¹,Schofield Steven R.¹,Curson Neil J.¹,Clark Robert G.¹

Affiliation:

1. Australian Research Council Centre of Excellence for Quantum Computer Technology, School of Physics, University of New South Wales, Sydney, NSW 2052, Australia

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/nl048808v

Reference22 articles.

1. Positioning single atoms with a scanning tunnelling microscope

2. Atom electronics: a proposal of atom/molecule switching devices

3. Prospects for atomically ordered device structures based on STM lithography

4. A Step Toward Making and Wiring Up Molecular-Scale Devices

5. Towards the fabrication of phosphorus qubits for a silicon quantum computer

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