Synthesis and Characterization of Ruthenium Complexes with Two Fluorinated Amino Alkoxide Chelates. The Quest To Design Suitable MOCVD Source Reagents-Reference-Cited by-同舟云学术

Synthesis and Characterization of Ruthenium Complexes with Two Fluorinated Amino Alkoxide Chelates. The Quest To Design Suitable MOCVD Source Reagents

Published:2003-05-23 Issue:12 Volume:15 Page:2454-2462
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Lai Ying-Hui¹,Chou Tsung-Yi¹,Song Yi-Hwa¹,Liu Chao-Shiuan¹,Chi Yun¹,Carty Arthur J.¹,Peng Shie-Ming¹,Lee Gene-Hsiang¹

Affiliation:

1. Department of Chemistry, National Tsing Hua University, Hsinchu 30013, Taiwan, Steacie Institute for Molecular Sciences, National Research Council Canada, 100 Sussex Drive, Ottawa, Ontario K1A 0R6, Canada, and Department of Chemistry and Instrumentation Center, National Taiwan University, Taipei 10764, Taiwan

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm030029c

Reference60 articles.

1. A stacked capacitor technology with ECR plasma MOCVD (Ba,Sr)TiO/sub 3/ and RuO/sub 2//Ru/TiN/TiSi/sub x/ storage nodes for Gb-scale DRAMs

2. Selective metalization by chemical vapor deposition

3. Reactivity and mechanism in the chemical vapour deposition of late transition metals

4. Fluidization, Spouting, and Metal–Organic CVD of Platinum Group Metals on Powders

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