1. School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States
2. Center for Nanoscale Materials, Argonne National Laboratory, Lemont, Illinois 60439, United States
3. Department of Chemistry, Purdue University, West Lafayette, Indiana 47907, United States
4. X-ray Science Division, Advanced Photon Source, Argonne National Laboratory, Lemont, Illinois 60439, United States
5. Veeco ALD, 130 Turner Street, Waltham, Massachusetts 02453, United States