Plasma-Enhanced Atomic Layer Deposition of Low Resistivity and Ultrathin Manganese Oxynitride Films with Excellent Resistance to Copper Diffusion
Author:
Affiliation:
1. State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
Funder
Ministry of Science and Technology of the People's Republic of China
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acsaelm.0c00224
Reference48 articles.
1. Plasma-enhanced atomic layer deposition of tungsten nitride
2. A Proposal for a Novel Hybrid Interconnect Technology for the End of Roadmap
3. Barrier Property of a Ta/MnSixOyLayer Formed by a Ta–Mn Alloy for a Cu Interconnect
4. Chemical Vapor Deposition of Mn and Mn Oxide and their Step Coverage and Diffusion Barrier Properties on Patterned Interconnect Structures
5. Self-forming Mn-based diffusion barriers on low-ksubstrates
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