Alternative Surface Reaction Route in the Atomic Layer Deposition of Titanium Nitride Thin Films for Electrode Applications-Reference-Cited by-同舟云学术

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Alternative Surface Reaction Route in the Atomic Layer Deposition of Titanium Nitride Thin Films for Electrode Applications

Published:2021-02-05 Issue:2 Volume:3 Page:999-1005
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Lee Hyeok Jae¹,Hwang Jin Ha¹,Park Ji-Yong¹^ORCID,Lee Sang Woon¹^ORCID

Affiliation:

1. Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea

Funder

National Research Foundation of Korea

Ministry of Trade, Industry and Energy

Gyeonggi-do Regional Research Center

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.0c01079

Reference28 articles.

1. An infrared study of the surface chemistry of titanium nitride atomic layer deposition on silica from TiCl4 and NH3

2. On the Reaction Scheme for Ti/TiN Chemical Vapor Deposition (CVD) Process Using TiCl4

3. Optimization of Titanium Nitride Rapid Thermal CVD Process

4. Atomic Layer Deposition (ALD) of Metal Gates for CMOS

5. Atomic Layer Epitaxy Growth of TiN Thin Films

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1. Plasmonic group IVB transition metal nitrides: Fabrication methods and applications in biosensing, photovoltaics and photocatalysis;Advances in Colloid and Interface Science;2024-11

2. Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: A brief review;Current Applied Physics;2024-08

3. Synthesis of high conformalty Ti-Six-N films using (CH3)3CCl and SiH4; density functional theory simulation and film characterization;Thin Solid Films;2024-07

4. Research Trends of Atomic Layer Deposition of Metal Nitrides and Their Applications in Semiconductor Industry;Ceramist;2024-03-31

5. Titanium nitride (TiN) as a promising alternative to plasmonic metals: a comprehensive review of synthesis and applications;Materials Advances;2024

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