Effect of O3 on Growth of Pt by Atomic Layer Deposition
Author:
Affiliation:
1. Department of Chemical Engineering, Stanford University, Stanford, California 94305, United States
2. Department of Materials Science and Engineering, Incheon National University, Incheon, Korea
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/jp502596n
Reference45 articles.
1. Examination of the activity and durability of PEMFC catalysts in liquid electrolytes
2. Atomic Layer Deposition: An Overview
3. Applications of atomic layer deposition to nanofabrication and emerging nanodevices
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