In Situ Reaction Mechanism Studies on the Atomic Layer Deposition of Al2O3 from (CH3)2AlCl and Water
Author:
Affiliation:
1. Laboratory of Inorganic Chemistry, Department of Chemistry, P.O. Box 55, University of Helsinki, Helsinki FI-00014, Finland
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la047153a
Reference22 articles.
1. Atomic layer epitaxy
2. Perfectly Conformal TiN and Al2O3 Films Deposited by Atomic Layer Deposition
3. Growth and characterization of aluminium oxide thin films deposited from various source materials by atomic layer epitaxy and chemical vapor deposition processes
4. Studies on the morphology of Al2O3 thin films grown by atomic layer epitaxy
5. Sequential surface chemical reaction limited growth of high quality Al2O3dielectrics
Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mechanistic study of the atomic layer deposition of cobalt: a combined mass spectrometric and computational approach;Physical Chemistry Chemical Physics;2024
2. Synthesis and characterization of N-TMS-2-pyridinamine dimethyl-aluminum: A dormant precursor;Inorganic Chemistry Communications;2022-08
3. Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al2O3 Films;The Journal of Physical Chemistry C;2022-04-18
4. In situ ellipsometry aided rapid ALD process development and parameter space visualization of cerium oxide nanofilms;Journal of Vacuum Science & Technology A;2021-12
5. Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide;Chemistry – A European Journal;2019-04-26
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3