Improving the Spatial Resolution in Direct Laser Writing Lithography by Using a Reversible Cationic Photoinitiator
Author:
Affiliation:
1. Quantum Electronics Laboratory, Faculty of Physics, Adam Mickiewicz University in Poznan, Umultowska 85, 61-614 Poznan, Poland
Funder
FP7 People: Marie-Curie Actions
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.7b03591
Reference37 articles.
1. Designable 3D nanofabrication by femtosecond laser direct writing
2. Ultrafast laser nanostructuring of photopolymers: A decade of advances
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4. λ/20 axial control in 25D polymerized structures fabricated with DLW lithography
5. Direct laser writing of three-dimensional photonic-crystal templates for telecommunications
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