Atomic Layer Deposition of Gallium Sulfide Films Using Hexakis(dimethylamido)digallium and Hydrogen Sulfide
Author:
Affiliation:
1. Energy Systems Division, ‡Chemical Sciences and Engineering Division, and §Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, United States
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm4031057
Reference73 articles.
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5. Influence of the synthesis conditions on gallium sulfide thin films prepared by modulated flux deposition
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