1. Leibniz Institute for Materials Engineering (IWT), 28359 Bremen, Germany
2. Faculty of Production Engineering, University of Bremen, 28359 Bremen, Germany
3. Institute of Semiconductor Technology (IHT), Braunschweig University of Technology, 38106 Braunschweig, Germany
4. Laboratory for Emerging Nanometrology (LENA), Braunschweig University of Technology, 38106 Braunschweig, Germany
5. MAPEX Center for Materials and Processes, University of Bremen, 28359 Bremen, Germany