1. Materials Science and Engineering Program, Department of Mechanical Engineering, University of California, La Jolla, San Diego, California 92093, United States
2. Corporate Research, Taiwan Semiconductor Manufacturing Company, San Jose, California 95134, United States
3. Department of Chemistry and Biochemistry, University of California, La Jolla, San Diego, California 92093, United States
4. Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu 30078, Taiwan