Thermal Modification of Plasma-Polymerized Organosilazane Thin Films
Author:
Affiliation:
1. Polish Academy of Sciences, Centre of Molecular Studies, Boczna 5, 90-362 Lodz, Poland
Publisher
AMERICAN CHEMICAL SOCIETY
Link
https://pubs.acs.org/doi/pdf/10.1021/bk-1979-0108.ch014
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Plasma-Polymerized Organosilicones and Organometallics;Plasma Deposition, Treatment, and Etching of Polymers;1990
2. Plasma-enhanced chemical vapor deposition of silicon nitride from 1,1,3,3,5,5-hexamethylcyclotrisilazane and ammonia;Thin Solid Films;1987-10
3. Thermal Decomposition of Plasma-Polymerized Organosilicon Thin Films;Journal of Macromolecular Science: Part A - Chemistry;1982-02
4. Preparation, structure, and some properties of organosilicon thin polymer films obtained by plasma polymerization;Progress in Colloid & Polymer Science
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