Efficient and Sensitive Capacitive Readout of Nanomechanical Resonator Arrays

Author:

Truitt Patrick A.1,Hertzberg Jared B.1,Huang C. C.1,Ekinci Kamil L.1,Schwab Keith C.1

Affiliation:

1. Department of Physics, University of Maryland, College Park, Maryland 20740, Electrical and Computer Engineering Department, Boston University, Boston, Massachusetts 02215, Aerospace and Mechanical Engineering Department, Boston University, Boston, Massachusetts 02215, and Laboratory for Physical Sciences, College Park, Maryland 20740

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

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