Top-Down Fabrication of Sub-30 nm Monocrystalline Silicon Nanowires Using Conventional Microfabrication
Author:
Affiliation:
1. BIOS Lab on a Chip Group
2. NanoElectronics Group
3. MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/nn901220g
Reference37 articles.
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