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360 nm Continuous Wave Laser-Based Contact or Non-Contact Laser Interference Nano Lithography

  • Published:2020-01-01 Issue:1 Volume:20 Page:128-134
  • ISSN:1533-4880
  • Container-title:Journal of Nanoscience and Nanotechnology
  • language:en
  • Short-container-title:j nanosci nanotechnol

Author:

Yun Dan Hee1,Shin Bo Sung2,Park Jun Han3,Ma Yong-Won1,Gwak Cheong Yeol1,You Dong Bin3,Kim Byung4

Affiliation:

1. Interdisciplinary Department for Advanced Innovative Manufacturing Engineering, Pusan Natl. Univ., Busan, 46241, Korea

2. Department of Optics and Mechatronics Engineering, Pusan Natl. Univ., Busan, 46241, Korea

3. Department of Cogno-Mechatronics Engineering, Pusan Natl. Univ., Busan, 46241, Korea

4. Department of Mechanical and Industrial Engineering, Univ. of Massachusetts, Amherst, MA 01003, USA

Publisher

American Scientific Publishers

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering

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