Sensitivity of Trapping Effect on Si<SUB>3</SUB>N<SUB>4</SUB> Sensing Membrane for Ion Sensitive Field Effect Transistor/Reference Field Effect Transistor Pair Application-Reference-Cited by-同舟云学术

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Sensitivity of Trapping Effect on Si₃N₄ Sensing Membrane for Ion Sensitive Field Effect Transistor/Reference Field Effect Transistor Pair Application

Published:2010-10-01 Issue:5 Volume:8 Page:725-729
ISSN:1546-198X
Container-title:Sensor Letters
language:en
Short-container-title:Sen Lett

Author:

Lue Cheng-En,Lai Chao-Sung,Wang I-Shun,Yang Chia-Ming

Publisher

American Scientific Publishers

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics

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