Characterization and Integration Performance of Methyl Silsesquioxane-Based Nano Porous Low-k Dielectric Films-Reference-Cited by-同舟云学术

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Characterization and Integration Performance of Methyl Silsesquioxane-Based Nano Porous Low-k Dielectric Films

Published:2016-11-01 Issue:11 Volume:16 Page:11224-11228
ISSN:1533-4880
Container-title:Journal of Nanoscience and Nanotechnology
language:en
Short-container-title:j nanosci nanotechnol

Author:

Choi Eunmi¹,Nam Minwoo¹,Kim Areum¹,Kang Keunwon¹,Zheng Longshou¹,Kwon Soon Hyeong¹,Yoon Sung Pil²,Hahn Sang June³,Kim Soo-Kil¹,Son Hyungbin¹,Pyo Sung Gyu¹

Affiliation:

1. School of Integrative Engineering, Chung-Ang University, Seoul 156-756, Korea

2. Fuel Cell Research Center, Korea Institute of Science and Technology, Seoul 136-791, Korea

3. Department of Physics, Chung-Ang University, Seoul 156-756, Korea

Publisher

American Scientific Publishers

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Preparation and Performance of Porous Polymer Electrolytes Doped with Nano-Al2O3;Journal of Nanoscience and Nanotechnology;2018-03-01

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