Author:
Damaskin B. B.,Baturina O. A.,Safonov V. A.,Safonov N. V.
Publisher
Springer Science and Business Media LLC
Cited by
4 articles.
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1. Obituary;Journal of Electroanalytical Chemistry;2020-07
2. The Influence of Adsorption Kinetics on Copper Superfilling for Dual Damascene;Journal of The Electrochemical Society;2016
3. To the 80th anniversary of B.B. Damaskin;Russian Journal of Electrochemistry;2012-06
4. Influence of Additive Coadsorption on Copper Superfill Behavior;Journal of The Electrochemical Society;2009