Study on Electro-Mechanical Characteristics of Array Type Capacitive Pressure Sensors with Stainless Steel Diaphragm and Substrate
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Published:2006-11-01
Issue:11
Volume:30
Page:1369-1375
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ISSN:1226-4873
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Container-title:Transactions of the Korean Society of Mechanical Engineers A
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language:en
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Short-container-title:Transactions of the Korean Society of Mechanical Engineers A
Author:
Lee Heung-Shik,Chang Sung-Pil,Cho Chong-Du
Publisher
The Korean Society of Mechanical Engineers
Subject
Mechanical Engineering