Acoustic Resonance Spectroscopy with an Uncalibrated Microwave Path-Reference-Cited by-同舟云学术

Acoustic Resonance Spectroscopy with an Uncalibrated Microwave Path

Published:2023-01-01 Issue:1 Volume:69 Page:32-40
ISSN:0320-7919
Container-title:Акустический журнал
language:
Short-container-title:Akustičeskij žurnal

Author:

Alekseev S. G.¹,Luzanov V. A.²,Raevsky A. O.²,Balashov V. V.²,Lopukhin K. V.²,Polzikova N. I.¹

Affiliation:

1. Kotelnikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, 125009, Moscow, Russia

2. Kotelnikov Institute of Radio Engineering and Electronics (Fryazino Branch), Russian Academy of Sciences, 141120, Fryazino, Moscow region, Russia

Abstract

Acoustic resonance spectroscopy (ARS) is an informative analytical method that yields information about thicknesses and acoustic properties of layers in a multilayer structure representing a high-overtone bulk acoustic wave resonator (HBAR). Since the HBAR spectrum has many resonance features, the development of automatic methods for its processing is an urgent task. In this study, a method for extracting ARS data from a signal distorted by a RF measuring path without additional measurements of reference impedances (calibration) is proposed, which brings the spectrum to a form convenient for automatic processing and significantly expands the range of the ARS application. The method is especially relevant for processing HBAR spectra with a low excitation efficiency. As an example of such processing, the central frequencies and effective widths of more than a thousand resonant peaks are determined and, based on this, the frequency dependence of the acoustic attenuation is established for a new material: optical ceramics based on doped yttrium aluminum garnet nanoparticles.

Publisher

The Russian Academy of Sciences

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