Fast Electrochemical Micropump for Portable Drug Delivery Module-Reference-Cited by-同舟云学术

Fast Electrochemical Micropump for Portable Drug Delivery Module

Published:2023-05-01 Issue:3 Volume:52 Page:227-235
ISSN:0544-1269
Container-title:Микроэлектроника
language:
Short-container-title:Mikroèlektronika

Author:

Uvarov I. V.¹,Shlepakov P. S.¹²,Abramychev A. M.¹²,Svetovoy V. B.³

Affiliation:

1. Valiev Institute of Physics and Technology, Yaroslavl Branch, Russian Academy of Sciences

2. Demidov Yaroslavl State University

3. Frumkin Institute of Physical Chemistry and Electrochemistry, Russian Academy of Sciences

Abstract

Microfluidic devices are capable of precise drug delivery to the human body. For this purpose, they must be equipped with a compact pump that provides a high flow rate and precise dosing. In this paper, we present a micropump based on a fast electrochemical actuator that meets these requirements. It contains three actuators operating in the peristaltic mode. The device is fabricated from glass and silicon wafers using the standard microfabrication processes. The working part of the pump has a size of about 3 mm3, which is an order of magnitude smaller than other types of diaphragm pumps. The small size of the actuators ensures ultrahigh liquid dosing accuracy of 0.14 nL. At the same time, the high frequency of operation of the actuators makes it possible to develop a specific pumping velocity comparable to other types of pumps.

Publisher

The Russian Academy of Sciences

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