Effect of Dry Oxidation and Thermal Annealing on AlN/GaN/AlN/Si (111) and Evaluation of its Electrical Characteristics
-
Published:2021-12-30
Issue:4
Volume:25
Page:
-
ISSN:2339-1995
-
Container-title:Makara Journal of Science
-
language:
-
Short-container-title:Makara J. Sci
Publisher
Universitas Indonesia, Directorate of Research and Public Service
Subject
General Physics and Astronomy,General Agricultural and Biological Sciences,General Biochemistry, Genetics and Molecular Biology,General Materials Science,General Chemistry