Evaluation of LSCO Electrodes for Sensor Protection Devices

Abstract

AbstractWe have evaluated lanthanum strontium cobalt oxide (La0.5OSr0.50COOx; LSCO 50/50) as a candidate “transparent” electrode for use in an electrostatic shutter-based infrared sensor protection device. The device requires that the electrode be transparent (80% transmission) and have moderate sheet resistance (300 – 500 Δ/sq.). To meet these needs, the effects of post-deposition annealing on the resistivity and optical absorption characteristics of sputter deposited LSCO thin films were studied. The as-deposited films were characterized by an absorption coefficient of ∼ 12,500 cm1−1 and resistivities of ∼ 0.08 to 0.5 Δ-cm. With annealing at 800°C, the resistivity decreased to 350 νΔ-cm, while the absorption coefficient increased to ∼ 155,000 cm1−1. By using a post-deposition annealing step at 800°C and controlling film thickness, it appears that a standard LSCO 50/50 material may possess the requisite conductivity and optical transmission properties for this sensor protection device.