The Mechanism of the Plasma Induced Deposition of a-Ge and μc-Ge from Germane: The limits and Possible Alternatives

Abstract

AbstractTime resolved mass spectrometry and the measurement of appearance potentials of various GeH -cationic fragments combined with selfconsistent theoretical modelling have been used to study the mechanism of plasma induced deposition of germanium. It is shown, that the high rate deposition occurs via germylene, GeH as the direct precursor. Digermane May play some role only at low deposition rates. Although we could reproduce the best values of theμτ product reported so far, no further improvement could be achieved.