Author:
Parker Michael A.,Hylton T. L.,Coffey K. R.,Howard J. K.
Abstract
ABSTRACTA new process for the crystallization of amorphous films on chemically dissimilar substrates, solid phase heteroepitaxy (SPHE), is described. Unlike SPE in Si, it is found that the kinetics can be modeled by nucleation and multi-dimensional growth with Johnson-Mehl kinetics modified for the effects of a finite film thickness and nucleation initiated at the interface with the substrate.
Publisher
Springer Science and Business Media LLC
Cited by
3 articles.
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