Instability of Nanocavities in Disordered and Amorphous Silicon Under Ion Irradiation-Reference-Cited by-同舟云学术

Instability of Nanocavities in Disordered and Amorphous Silicon Under Ion Irradiation

Published:1998 Issue: Volume:540 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Zhu X.,Williams J.S.,McCallum J.C.

Abstract

AbstractIt has recently been shown that a band of nanocavities in crystalline silicon is eliminated during amorphization of the silicon surrounding this band [4]. In this study, we examine the effect of irradiation dose on nanocavity stability. Gettering of Au is used as a detector for open volume defects following annealing of irradiated samples. Rutherford backscattering and channeling and cross-sectional transmission electron microscopy have been used to analyse the samples. Cavities are only completely removed when the region surrounding the cavities is totally amorphized up to the surface. Partial amorphization leaves residual open volume defects.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference8 articles.

1. 6. Venezia V.C. , Eaglesham D.J. , Haynes T.E. , Agarwal A. , Jacobson D.C. , Gossmann H.J. and Baumann F.H. , submitted to Applied Physics Letters.

2. Gettering of Au to dislocations and cavities in silicon

3. 4. Zhu X. , Williams J.S. , Llewellyn D.J. and McCallum J.C. , Applied Physics Letters, (in press).

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1. Evidence of Ultrafast Energy Exchange-Induced Soft Mode of Phonons and Lattice Instability: a Nanotime Effect;Chinese Physics Letters;2005-02-24

2. Nanocavity Shrinkage and Preferential Amorphization during Irradiation in Silicon;Chinese Physics Letters;2005-02-24

3. Evidence of an antisymmetry relation between a nanocavity and a nanoparticle: a novel nanosize effect;Journal of Physics: Condensed Matter;2003-04-22

4. Collapse of nanocavities studied by ion-channeling and Raman spectroscopy;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-05