Abstract
ABSTRACTR&D projects of ion beam systems and ion beam process technology have been conducted under the National Research and Development Program known as the “Large-Scale project”. The project includes development of five large-scale ion beam systems and their application for surface modifications. Under another program called the National Research Facility Development Project, the Ion Engineering Center Corporation has been established in order to promote industrial applications of ion beam processes. This paper reviews those projects and recent progress on development of large-scale ion beam systems and related materials processing technology. Major research projects which have been funded by the Ministry of Education for ion beam related researches are also reviewed.
Publisher
Springer Science and Business Media LLC
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