Orientation-Dependence of Low Temperature Epitaxial Silicon Growth

Abstract

ABSTRACTElectronic properties of thin epitaxial silicon films deposited at temperatures below 650°C by means of ion-assisted deposition strongly depend on substrate orientation as well as on deposition temperature: In (100)-oriented epitaxial films we find a low density of structural defects, and the minority carrier diffusion length is only limited by the presence of point defects or point defect complexes. These investigations also show an improvement of the electronic quality with increasing deposition temperature. Epitaxy on non-(100)-oriented substrates results in a significantly higher density of structural defects. The electronic properties of films deposited on stable flat surfaces, such as (111)- and (113)-oriented substrates are inferior as compared to (100)-oriented films, but are still superior to those of films deposited on faceted surfaces, as shown by light beam induced current and electron back-scattering diffraction measurements of polycrystalline thin films.