Local electromechanical properties of ferroelectric materials for piezoelectric applications

Abstract

ABSTRACTLocal electromechanical characterization is becoming prerequisite for the development of ferroelectric-based piezoelectric devices including multilayer actuators, micromotors, piezoelectric filters and, especially, microelectromechanical systems (MEMS), which combine piezoelectric elements and control electronics on the same chip. In this work, we present the results of local electromechanical characterization of several important ferroelectric materials including Pb(Zr, Ti)O3 (PZT) and (Pb, La)(Zr, Ti)O3 (PLZT) in both thin film and ceramic form. Local piezoelectric hysteresis measurements are performed by the piezoelectric force microscopy (PFM) that detects small electric field-induced deformation on the nanoscale e. g., within the single grain of a polycrystalline material. A number of novel phenomena is observed with increasing dc bias voltage including the jump of ferroelectric domain wall to the grain boundary, the “fingerlike” instability of domain wall, and the local phase transition into ferroelectric phase.