Author:
Dorfman B.,Abraizov M.,Pypkin B.,Strongin M.,Yangn X.-Q.,Yan D.,Pollak Fred H.,Grow J.,Levy R.
Abstract
ABSTRACTDiamond-like nanocomposite (DLN) and metal containing DLN (Me-DLN) films, synthesized in a combined process of deposition of carbon-silicon precursor and magnetron sputtering of a metal target, have been examined by Auger electron spectroscopy, Raman and IR spectroscopy, nanoindentation and internal stress measurements. The stability of the films under ion and electron irradiation and thermal annealing has been tested.
Publisher
Springer Science and Business Media LLC
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献