Stress and Electromigration

Author:

Lloyd J.R.

Abstract

The interdependence of mechanical stress and electromigration behavior has been recognized for quite some time, but has only begun to be fully appreciated and dealt with in a meaningful manner. There have been a number of recent advances in understanding that also may lead to a change in the way that electromigration failure is viewed in real applications.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference51 articles.

Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Reliability;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22

2. Modeling of Electromigration in Interconnects;Springer Series in MATERIALS SCIENCE;2004

3. Effect of via etching process and postclean treatment on via electrical performance;Journal of Electronic Materials;2001-12

4. Modeling early failure in integrated circuit interconnect;Microelectronics Reliability;2000-06

5. Instrumentation effects on the detection of resistance transients during accelerated testing of VLSI interconnects;IEEE Transactions on Instrumentation and Measurement;2000

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