Spontaneous Lateral Modulations in InAlAs Buffer Layers Grown by MBE on InP Substrates

Author:

Peiró F.,Cornet A.,Ferrer J. C.,Morante J. R.,Halkias G.,Georgakilas A.

Abstract

AbstractTransmission Electron Microscopy (TEM) and X-ray Diffraction (XRD) have been used to analyze the spontaneous appearance of lateral composition modulations in InyAl1−yAs (yIn.≅ 50%) buffer layers of single quantum well structures grown by molecular beam epitaxy on exact and vicinal (100) InP substrates, at growth temperatures in the range of 530°C–580°C. The influence of the growth temperature, substrate misorientation and epilayer mismatch on the InAlAs lateral modulation is discussed. The development of a self-induced quantum-wire like morphology in the In0.53Ga0.47As single quantum wells grown over the modulated buffers is also commented on.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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