Author:
Matsumaru Koji,Takata Atsushi
Abstract
The articles thus far in this MRS Bulletin issue on Emerging Methods for Micro- and Nanofabrication have addressed the creation of structures or devices on a small scale. What is implicit in some of these articles is that a substrate of sufficient flatness is available upon which to build these structures in a controlled way. A related area, therefore, is the formation of these flat surfaces, as well as the development of the tools to make them.
Publisher
Springer Science and Business Media LLC
Subject
Physical and Theoretical Chemistry,Condensed Matter Physics,General Materials Science
Reference11 articles.
1. Fabrication of Porous Cast-Iron Bonded Diamond Grinding Wheels and Their Evaluation to Grind Hard-to-Grind Ceramics
2. 5. Ishizaki K. and Takata A. , Japanese Patent Pending (1998).
3. 3. Ishizaki K. , Yamamoto S. , Takata A. , and Kondo Y. , U.S. Patent No. 5,637,123 (June 10, 1997).
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2 articles.
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